氧化铝/氮化硅双层膜晶硅钝化的开尔文探针力显微镜研究
PDF下载 (276)郑 珍,陈王华.氧化铝/氮化硅双层膜晶硅钝化的开尔文探针力显微镜研究[J].宁波大学学报(理工版),2021,34(5):61-66.DOI:
ZHENG Zhen,CHEN Wanghua.Kelvin probe force microscopy study on the passivation of aluminum oxide/silicon nitride bilayer for crystalline silicon[J].Journal of Ningbo University(Natural Science & Engineering Edition),2021,34(5):61-66.DOI:
| Title: | Kelvin probe force microscopy study on the passivation of aluminum oxide/silicon nitride bilayer for crystalline silicon |
| 作者: | 郑 珍, 陈王华 |
| Author(s): | ZHENG Zhen, CHEN Wanghua |
| 关键词: | 开尔文探针力显微镜; 钝化; 氧化铝; 氮化硅; 表面电势; 功函数 |
| Keywords: | Kelvin probe force microscopy; passivation, AlOx; SiNx:H; surface potential; work function |
| 分类号: | O469 |
| 文献标识码: | A |
| 摘要: | 对晶体硅(c-Si)太阳能电池而言, 氧化铝(AlOx)是一种广泛使用的钝化材料, 因为它具有优异的沉积保形性和良好的钝化质量. 为了确保AlOx发挥其良好的钝化效果, 在沉积后退火并氢化处理是必不可少的. 通过在AlOx薄膜上沉积氢化氮化硅(SiNx:H)来实现氢化, 利用开尔文探针力显微镜研究了在不同热处理和氢化作用下, AlOx/SiNx:H双层薄膜功函数的变化, 并基于沉积薄膜所含氢与固定电荷展开了讨论. 发现钝化质量和功函数之间有相关性, 影响因素包括薄膜厚度、氢化与热处理顺序. |
| Abstract: | Aluminium oxide (AlOx) is a widely used passivation material as far as the crystalline silicon (c-Si) solar cells are concerned because of its perfect deposition conformality and good passivation quality. To ensure a good passivation quality, a post-deposition treatment of AlOx layers including hydrogenation is considered indispensable. In this study, hydrogenation is realized by depositing a hydrogenated silicon nitride (SiNx:H) on AlOx layer. The variant function of AlOx/SiNx:H bilayers under different thermal treatments and hydrogenation is investigated. Discussion based on layer contented hydrogen and fixed charge is conducted. A strong correlation between passivation quality and work function is identified, where the correlation is found to be influenced by layer thickness, thermal treatment sequence and hydrogenation. |
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| 备注/Memo: | 收稿日期: 2021－06－04. 宁波大学学报（理工版）网址: http://journallg.nbu.edu.cn/ 第一作者: 郑珍（1994－）, 女, 甘肃文县人, 在读硕士研究生, 主要研究方向: 硅基太阳能电池. E-mail: 375721544@qq.com *通信作者: 陈王华（1983－）, 男, 浙江绍兴人, 博士/教授, 主要研究方向: 半导体薄膜和纳米线及其器件. E-mail: chenwanghua@nbu.edu.cn 宁波大学学报（理工版）网址：http://journallg.nbu.edu.cn/ |
