电机驱动微装配在双光子制备微结构中的应用
PDF下载 (4641)夏锦涛,丁阿飞,王 杭,王 刚,陶卫东.电机驱动微装配在双光子制备微结构中的应用[J].宁波大学学报(理工版),2021,34(1):65-69.DOI:
XIA Jintao,DING Afei,WANG Hang,WANG Gang,TAO Weidong.Application of motor driven micro-assembly in two-photon fabrication of micro-structure[J].Journal of Ningbo University(Natural Science & Engineering Edition),2021,34(1):65-69.DOI:
| Title: | Application of motor driven micro-assembly in two-photon fabrication of micro-structure |
| 作者: | 夏锦涛, 丁阿飞, 王 杭, 王 刚, 陶卫东 |
| Author(s): | XIA Jintao, DING Afei, WANG Hang, WANG Gang, TAO Weidong |
| 关键词: | 双光子; 微装配; 步进电机; 荧光粉末; 远程操控 |
| Keywords: | two-photon; micro-assembly; stepping motor; fluorescent powder; remote control |
| 分类号: | O437 |
| 文献标识码: | A |
| 摘要: | 对微结构的制作、微装配系统进行了研究. 采用飞秒激光双光子聚合微加工技术制作有底座、精细的三维立体“拱形”微结构, 其高250μm、长300μm、厚50μm. 将此微结构与实验室自主搭建的二维微装配平台相结合, 利用自主编程的人机交互界面驱动步进电机, 远程操控微装配设备; 将荧光闪烁陶瓷粉末装配到微结构中, 对装配后的微结构进行荧光光谱表征发现, 纯荧光粉末和微结构中的荧光粉末的发射光谱在测量误差范围内基本一致, 表明荧光粉末的光学性质未发生改变. 利用该装置可以将各类微纳米级材料和微结构进行装配, 形成含有不同材料的微结构系统. |
| Abstract: | In order to study the assembly methods of various micro-nanometer materials and micro-structures, the fabrication of micro-structures and the working mode of micro-assembly systems are first studied. The femtosecond laser two-photon polymerization micro-machining technology is employed to fabricate a fine three-dimensional “arch” micro-structure with a base, with 250μm in height, 300μm in length and 50μm in thickness. The micro-structure is combined with the two-dimensional micro-assembly platform independently built in the laboratory, and the self-designed human-computer interface is used to drive the stepping motor. The micro-assembly device can be remotely controlled to assemble the fluorescent scintillation ceramic powder (hereinafter referred to as fluorescent powder) into the micro-structure. Through the fluorescence spectrum characterization of the assembled micro-structure, the results show that the emission spectrum of the pure fluorescent powder and the fluorescent powder in the micro-structure is basically the same within the measurement error range, and the optical properties of the fluorescent powder remain unchanged. Through this experimental device, we can implement the electric assembly of fluorescent powder and micro-structure without affecting the properties of fluorescent powder. We can also use this device to assemble a vast variety of micro-nanometer materials and micro-structure so as to form the micro-structure system with different materials. |
| 参考文献 /References: | [1] Gattass R R, Mazur E. Femtosecond laser micro- machining in transparent materials[J]. Nature Photonics, 2008, 2(4):219-225. [2] 曹小文, 张雷, 于永森, 等. 飞秒激光制备微光学元件及其应用[J]. 中国激光, 2017, 44(1):46-58. [3] 孙树峰, 王萍萍. 飞秒激光双光子聚合加工微纳结构[J]. 红外与激光工程, 2018, 47(12):64-68. [4] Galajda P, Ormos P. Complex micromachines produced and driven by light[J]. Applied Physics Letters, 2001, 78(2):249-251. [5] Maruo S, Inoue H. Optically driven micropump produced by three-dimensional two-photon microfabrication[J]. Applied Physics Letters, 2006, 89(14):144101. [6] Dai L G, Ge Z X, Jiao N D, et al. 2D to 3D manipulation and assembly of microstructures using optothermally generated surface bubble microrobots[J]. Small, 2019, 15(45):1902815. [7] Fan X J, Sun M M, Lin Z H, et al. Automated noncontact micromanipulation using magnetic swimming microrobots [J]. IEEE Transactions on Nanotechnology, 2018, 17(4):666-669. [8] Egawa M, Ishida T, Jalabert L, et al. In-situ realtime monitoring of nanoscale gold electroplating using micro-electro-mechanical systems liquid cell operating in transmission electron microscopy[J]. Applied Physics Letters, 2016, 108(2):023104. [9] 张颖, 吴俊, 魏江南, 等. 基于微机电系统技术的光纤加速度传感器[J]. 光学学报, 2018, 38(6):65-71. [10] 王永杰, 张嘉易, 董福禄, 等. 基于微装配的电控位移台控制系统设计[J]. 成组技术与生产现代化, 2014, 31(1):25-28. [11] 王苗辉, 李艳, 宋武, 等. 基于科学实验的人机交互界面设计研究——以格力空调为例[J]. 图学学报, 2019, 40(1):181-185. [12] 吴文荣, 余大海, 裘祖荣, 等. 毫米器件半自动微装配系统研制[J]. 传感器与微系统, 2013, 32(1):83-86; 90. [13] 龚莹, 蒋中伟, 周拥军, 等. 飞秒激光双光子微细加工技术及研究现状[J]. 光学技术, 2004, 30(4):637-640. [14] 蔡华, 曹振博, 李方骏, 等. 微通道板表面碳污染的去除[J]. 中国建材科技, 2017, 26(1):33-35. [15] Chourpa I, Cohen-Jonathan S, Dubois P. Mapping Chemical and Structural Composition of Pharmaceutical and Biological Samples by Raman, Surface-Enhanced Raman and Fluorescence Spectral Imaging[M]. Berlin: Springer, 2012:243-255. [16] Feng L Y, Qin Z Y, Huang Y J, et al. Boron-, sulfur-, and phosphorus-doped graphene for environmental applications [J]. Science of the Total Environment, 2020, 698:134239. |
| 备注/Memo: | 收稿日期: 2019-12-12. 宁波大学学报(理工版)网址: http://journallg.nbu.edu.cn/基金项目: 国家自然科学基金(11704204).第一作者: 夏锦涛(1994-), 男, 安徽六安人, 在读硕士研究生, 主要研究方向: 飞秒激光微加工. E-mail: 13345961994@163.com*通信作者: 陶卫东(1969-), 男, 浙江宁波人, 教授, 主要研究方向: 飞秒激光微加工. E-mail: taoweidong@nbu.edu.cn 宁波大学学报(理工版)网址:http://journallg.nbu.edu.cn/ |