基于螺旋扫描的表面三维形貌快速测量
PDF下载 (18705)刘 康 1,孙庆龙 2,卢志诚 1,应志奇 1,惠相君 1,周鹏飞 1,崔玉国 1*.基于螺旋扫描的表面三维形貌快速测量[J].宁波大学学报(理工版),2018,31(4):20-24.DOI:
LIU Kang 1,SUN Qing-long 2,LU Zhi-cheng 1,YING Zhi-qi 1,HUI Xiang-jun 1,ZHOU Peng-fei 1,CUI Yu-guo 1*.Rapid measurement of three-dimensional topography on surface based on spiral scanning[J].Journal of Ningbo University(Natural Science & Engineering Edition),2018,31(4):20-24.DOI:
| Title: | Rapid measurement of three-dimensional topography on surface based on spiral scanning |
| 作者: | 刘 康 1, 孙庆龙 2, 卢志诚 1, 应志奇 1, 惠相君 1, 周鹏飞 1, 崔玉国 1* |
| Author(s): | LIU Kang 1, SUN Qing-long 2, LU Zhi-cheng 1, YING Zhi-qi 1, HUI Xiang-jun 1, ZHOU Peng-fei 1, CUI Yu-guo 1* |
| 关键词: | 表面三维形貌; 快速测量; 螺旋扫描; 激光三角法 |
| Keywords: | three-dimensional topography on surface; rapid measurement; spiral scanning; laser triangular measurement |
| 分类号: | TH-39 |
| 文献标识码: | A |
| 摘要: | 为实现精密表面三维形貌的快速测量, 提出一种螺旋式扫描测量方法. 首先, 基于x、y、z向直线运动平台、DD马达旋转平台以及激光位移传感器, 搭建三维形貌测量系统, 其中被测试件表面形貌的平面位置信息通过x向平台与DD马达同步运动所形成的螺旋扫描运动来获得, 被测试件表面形貌的高度信息由激光位移传感器来获得; 然后, 基于所搭建的测量系统, 对表面形貌为凸凹扇形的圆形试件的表面进行测量. 结果表明: 测量直径为15mm的圆形区域所用的时间为420s, 能较好地实现被测试件表面形貌的快速测量. |
| Abstract: | A spiral scanning measurement method is proposed in order to realize rapid measurement of the three-dimensional topography of the precision surface. First of all, a three-dimensional topography measurement system is setup based on x, y, z linear motion platform, DD motor rotation platform and laser displacement sensor. the plane position information of the specimen’s surface morphology is obtained by the spiral scanning formed by x platform and DD motor synchronous motion, at the same time the height information of the specimen’s surface morphology is obtained by laser displacement sensor. Then, based on the built three- dimensional topography measurement system, a circular specimen with convex and concave fan shaped surface is measured. The results show that when the measured circular area of diameter is F15mm, the total time is 420s, so the spiral scanning measurement method can better realize rapid measurement of surface topography of the specimen. |
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| 备注/Memo: | 收稿日期: 2018－01－22. 宁波大学学报（理工版）网址: http://journallg.nbu.edu.cn/基金项目: 国家自然科学基金（51675288）.第一作者: 刘康（1993－）, 男, 湖北仙桃人, 在读硕士研究生, 主要研究方向: 微/纳米定位技术. E-mail: liukangedu@126.com*通信作者: 崔玉国（1971－）, 男, 吉林农安人, 教授, 主要研究方向: 微/纳米定位及精密测量技术. E-mail: cuiyuguo@nbu.edu.cn 宁波大学学报（理工版）网址：http://journallg.nbu.edu.cn/ |
