基于Ge-Sb-Se薄膜的硫系光波导制备工艺研究
PDF下载 (9484)周 杰 1,2,赵 阳 1,2,张 巍 1,2*.基于Ge-Sb-Se薄膜的硫系光波导制备工艺研究[J].宁波大学学报(理工版),2018,31(4):59-64.DOI:
ZHOU Jie 1,2,ZHAO Yang 1,2,ZHANG Wei 1,2*.Fabrication process optimization of chalcogenide waveguide based on Ge-Sb-Se films[J].Journal of Ningbo University(Natural Science & Engineering Edition),2018,31(4):59-64.DOI:
| Title: | Fabrication process optimization of chalcogenide waveguide based on Ge-Sb-Se films |
| 作者: | 周 杰 1, 2, 赵 阳 1, 2, 张 巍 1, 2* |
| Author(s): | ZHOU Jie 1, 2, ZHAO Yang 1, 2, ZHANG Wei 1, 2* |
| 关键词: | 硫系玻璃; 薄膜; 电感耦合等离子体刻蚀; 光波导 |
| Keywords: | chalcogenide glass; thin film; inductively coupled plasma etch; optical waveguide |
| 分类号: | TN252 |
| 文献标识码: | A |
| 摘要: | 通过传统熔融淬冷技术制备Ge28Sb12Se60硫系玻璃, 并由热蒸发技术制备出Ge28Sb12Se60非晶态薄膜, 利用电感耦合等离子体(ICP)刻蚀机在不同刻蚀气体氛围下制备出Ge-Sb-Se硫系光波导. 研究了不同刻蚀功率和不同刻蚀气体流量比等条件参数对制备所得Ge-Sb-Se波导表面形貌的影响, 利用台阶仪测量其刻蚀速率, 扫描电子显微镜(SEM)和扫描探针显微镜(SPM)测量波导形貌以及表面粗糙度. 结果显示, 对于相同组分材料的Ge-Sb-Se硫系薄膜, 相比于CF4/O2刻蚀气体, CF4/CHF3混合刻蚀气体制备出的波导具有较低的表面粗糙度、较光滑的侧壁和较大的刻蚀选择比, 1550nm处2μm宽波导传输损耗为(1.73±0.24)dB·cm-1. |
| Abstract: | The target Ge28Sb12Se60 glasses are prepared from conventional melt-quenching technique, and the Ge28Sb12Se60 films are deposited by thermal evaporation method, followed by Inductively Coupled Plasma (ICP) etching to fabricate waveguide, under different etching atmosphere. The influences of different parameters such as etching power, pressure and total gases flow are investigated. The surface profiler is used to determine the etching rate, and the profile and surface roughness of the waveguides are measured by the scanning electron microscope (SEM) and the scanning probe microscope (SPM). The measurement results show that the waveguides fabricated by CF4/CHF3 recipe achieve better surface profile and etching selectivity, comparing to CF4/O2 recipe with the same composition of the materials. Propagation loss of 2μm wide waveguides are tested and found to be as low as (1.73±0.24)dB·cm-1 at 1550nm. The research shows that it is feasible to fabricate high quality Ge28Sb12Se60 thin film and waveguides, which are promising in integrated optical and photonic devices applications. |
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| 备注/Memo: | 收稿日期: 2018－02－04. 宁波大学学报（理工版）网址: http://journallg.nbu.edu.cn/基金项目: 宁波市自然科学基金（2015A610122）; 宁波大学微纳电子信息系统市重点学科基金（XKl15D226）.第一作者: 周杰（1992－）, 男, 安徽亳州人, 在读硕士研究生, 主要研究方向: 硫系光波导制备及工艺优化. E-mail: 1208789600@qq.com*通信作者: 张巍（1979－）, 男, 江苏徐州人, 博士/副研究员, 主要研究方向: 微纳硫系光器件. E-mail: zhangwei3@nbu.edu.cn 宁波大学学报（理工版）网址：http://journallg.nbu.edu.cn/ |
