基于As2Se3玻璃的厘米级长波红外超透镜研究
PDF下载 (183)陈 旭,谷招峰,陈益敏,刘自军,顾辰杰,沈 祥.基于As2Se3玻璃的厘米级长波红外超透镜研究[J].宁波大学学报(理工版),2025,38(4):49-55.DOI:10.20098/j.cnki.1001-5132.2024.1205
CHEN Xu,GU Zhaofeng,CHEN Yimin,LIU Zijun,GU Chenjie,SHEN Xiang.Research on centimeter-scale long-wave infrared metalens based on As2Se3 glass[J].Journal of Ningbo University(Natural Science & Engineering Edition),2025,38(4):49-55.DOI:10.20098/j.cnki.1001-5132.2024.1205
| Title: | Research on centimeter-scale long-wave infrared metalens based on As2Se3 glass |
| 作者: | 陈 旭, 谷招峰, 陈益敏, 刘自军, 顾辰杰, 沈 祥 |
| Author(s): | CHEN Xu, GU Zhaofeng, CHEN Yimin, LIU Zijun, GU Chenjie, SHEN Xiang |
| 关键词: | 硫系玻璃; 长波红外; 厘米级超透镜; 紫外光刻 |
| Keywords: | chalcogenide glass; long-wave infrared; centimeter-scale metalens; ultravioletlithography |
| 分类号: | TN215 |
| DOI: | 10.20098/j.cnki.1001-5132.2024.1205 |
| 文献标识码: | A |
| 摘要: | 长波红外超透镜是一种由亚波长尺寸的微结构单元构成的光学元件，在夜视、医疗诊断等领域应用前景广泛，但在材料表面大面积精确制造微结构单元困难，超透镜尺寸通常被限制在毫米级，导致其应用场景受限。为此，基于硒化砷（As2Se3）硫系玻璃，利用时域有限差分法（Finite-Difference Time-Domain，FDTD）设计了一种适用于长波红外（LWIR）的厘米级超透镜，并研发了一套基于紫外光刻和电感耦合等离子体刻蚀的高效、大尺寸制备技术，制备得到的超透镜直径和焦距均为1cm，工作波长为9.78μm，聚焦光斑的半高全宽（FWHM）为17.47μm，能够对电烙铁和人手进行较为清晰的成像。 |
| Abstract: | Long-wave infrared (LWIR) metalens is an optical element composed of sub-wavelength-sized microstructures, offering broad application prospects in night vision, medical diagnosis, and other fields. However, precise fabrication of microstructures over large areas on material surfaces is extremely challenging, thereby limiting the size of metalens to millimeter-scale levels and significantly restricting their applications. To address this issue, a centimeter-scale metalens suitable for LWIR was designed based on arsenic selenide (As2Se3) chalcogenide glass using the finite-difference time-domain (FDTD) method. An efficient and large-scale fabrication technology was also developed based on ultraviolet lithography and inductively coupled plasma etching. The fabricated metalens has a diameter and focal length of 1 cm, operates at a wavelength of 9.78 μm, and achieves a full width at half maximum (FWHM) of 17.47 μm for the focal spot. It is capable of providing relatively clear imaging of objects such as soldering irons and human hands. |
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| 备注/Memo: | 收稿日期：2024−12−11 宁波大学学报（理工版）网址：http://journallg.nbu.edu.cn/ 基金项目：浙江省自然科学基金创新群体项目（LDT23F05015F05） 第一作者：陈 旭，硕士研究生，主要研究方向为硫系材料及其光电器件。E-mail: chenxu000221@163.com *通信作者：沈 祥，研究员，主要研究方向为红外硫系玻璃材料与器件。E-mail: shenxiang@nbu.edu.cn 宁波大学学报（理工版）网址：http://journallg.nbu.edu.cn/ |
