射频功率对硫系玻璃基底DLC膜性能的影响
PDF下载 (91)段玉晴,施 松,刘自军,顾辰杰,顾杰荣,沈 祥.射频功率对硫系玻璃基底DLC膜性能的影响[J].宁波大学学报(理工版),2026,39(1):17-25.DOI:10.20098/j.cnki.1001-5132.2025.0308
DUAN Yuqing,SHI Song,LIU Zijun,GU Chenjie,GU Jierong,SHEN Xiang.The effect of RF-power on the performance of DLC films on chalcogenide glass substrates[J].Journal of Ningbo University(Natural Science & Engineering Edition),2026,39(1):17-25.DOI:10.20098/j.cnki.1001-5132.2025.0308
| Title: | The effect of RF-power on the performance of DLC films on chalcogenide glass substrates |
| 作者: | 段玉晴, 施 松, 刘自军, 顾辰杰, 顾杰荣, 沈 祥 |
| Author(s): | DUAN Yuqing, SHI Song, LIU Zijun, GU Chenjie, GU Jierong, SHEN Xiang |
| 关键词: | 类金刚石薄膜; 等离子体增强化学气相沉积; 射频功率; 纳米硬度 |
| Keywords: | diamond-like carbon films; plasma-enhanced chemical vapor deposition; RF-power; nano hardness |
| 分类号: | TN213 |
| DOI: | 10.20098/j.cnki.1001-5132.2025.0308 |
| 文献标识码: | A |
| 摘要: | 采用射频等离子体增强化学气相沉积法（Radio Frequency Plasma-Enhanced Chemical Vapor Deposition，RF-PECVD）在硫系玻璃（As40Se60）表面沉积类金刚石（Diamond-Like Carbon，DLC）薄膜。通过研究沉积过程中射频功率（400~700W）的变化，系统分析其对DLC膜的结构、力学性能、光学性能及环境适应性的影响。研究结果表明，随着射频功率的增加，DLC膜具有金刚石特征的sp3杂化态比例和硬度均相应增加，而摩擦系数在功率为600W时最低。此外，DLC膜在8~12 μm波段表现出较高的透过率，证明其能作为硫系玻璃保护膜的可行性。环境适应性测试显示，除700W功率下的薄膜在湿热测试后出现脱膜现象外，其他功率条件下的薄膜均具有良好的耐环境性能，可满足应用的要求。 |
| Abstract: | The study investigates the deposition of Diamond-Like Carbon (DLC) films on arsenic selenide (As40Se60) glass substrates using radio frequency plasma-enhanced chemical vapor deposition (RF-PECVD). By varying the RF-power (400-700 W) during the deposition process, its effects on the structure, mechanical properties, optical properties, and environmental stability of the DLC films were analyzed. The results show that as the RF-power increases, both the deposition rate and negative self-bias increase, along with a corresponding rise in the sp3 content and hardness of the films. The friction performance is optimal at 600 W, where the friction coefficient is the lowest. Additionally, the DLC films exhibited good transmittance in the 8-12 μm wavelength range, confirming their feasibility as protective coatings for arsenic selenide glass. Environmental stability tests indicate that, except for the films deposited at 700 W, which exhibited delamination after high humidity and temperature exposure, the films deposited at other power levels show good environmental resistance. |
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| 备注/Memo: | 收稿日期：2025-03-14 宁波大学学报（理工版）网址：http://journallg.nbu.edu.cn/ 基金项目：国家科技部重点研发项目（2024YFB3815900）；国家自然科学基金区域创新联合项目（U24A20313，U21A2056）；国家自然科学基金（61975086）；浙江省自然科学基金重点项目（LDT23F05012F05） 第一作者：段玉晴，硕士研究生，主要研究方向为硫系玻璃表面光学薄膜制备。E-mail: 1442293612@qq.com *通信作者：沈 祥，研究员，主要研究方向为硫系玻璃薄膜及其可重构光子器件。E-mail: shenxiang@nbu.edu.cn 宁波大学学报（理工版）网址：http://journallg.nbu.edu.cn/ |
