基于Ag-In2O3的碳基FET型室温甲烷传感器研究
PDF下载 (187)张 勇,许 浩,刘勃豪.基于Ag-In2O3的碳基FET型室温甲烷传感器研究[J].宁波大学学报(理工版),2025,38(6):31-40.DOI:10.20098/j.cnki.1001-5132.2025.0320
ZHANG Yong,XU Hao,LIU Bohao.A carbon-based FET-type room-temperature methane sensor based on Ag-In2O3[J].Journal of Ningbo University(Natural Science & Engineering Edition),2025,38(6):31-40.DOI:10.20098/j.cnki.1001-5132.2025.0320
| Title: | A carbon-based FET-type room-temperature methane sensor based on Ag-In2O3 |
| 作者: | 张 勇, 许 浩, 刘勃豪 |
| Author(s): | ZHANG Yong, XU Hao, LIU Bohao |
| 关键词: | 甲烷; 室温检测; 场效应晶体管; 碳纳米管 |
| Keywords: | Ag-In2O3; methane; room-temperature detection; field-effecttransistor; carbon nanotube |
| 分类号: | TP212 |
| DOI: | 10.20098/j.cnki.1001-5132.2025.0320 |
| 文献标识码: | A |
| 摘要: | 甲烷（CH4）作为一种相对清洁的化石能源在居民生活与工业生产领域应用广泛，但其泄漏带来的安全隐患不容忽视，研发无须加热的室温CH4传感器对安全检测意义重大。目前室温CH4传感器因室温环境难以提供反应所需的活化能，致使气敏信号微弱，存在灵敏度低、检测下限高的不足。为此，设计了一种基于Ag掺杂氧化铟（Ag-In2O3）敏感材料的碳基场效应晶体管（FET）型传感器，利用Ag的催化作用降低CH4在In2O3表面反应所需的活化能，同时结合FET具有对微弱信号的放大能力，实现在室温环境下对体积分数20×10−6~500×10−6 CH4的检测。该传感器具备检测下限低（体积分数20×10−6）、抗湿性能良好、重复性优异（相对标准偏差小于5%）、长期稳定性较好等优点，可为开发高性能室温CH4传感器提供参考。 |
| Abstract: | As a relatively clean fossil fuel, methane (CH4) is widely used in both residential life and industrial production. However, the safety hazards caused by its leakage cannot be ignored. Therefore, the development of room-temperature CH4 sensors without heating is of great significance for safety monitoring. Room-temperature CH4 sensors suffer from limitations such as low sensitivity and insufficient detection limits, which are primarily attributed to the insufficient activation energy provided at room temperature for the chemical reactions, resulting in the weak gas-induced sensing signals. To address these shortcomings, this work designed a carbon-based field-effect transistor (FET) sensor based on Ag-doped indium oxide (Ag-In2O3) sensing material. By combining the catalytic effect of Ag to reduce the reacting activation energy of CH4 on the In2O3 surface and the weak sensing signal amplification capability of the FET, the Ag-In2O3 FET sensor successfully achieved a room temperature detection toward 70×10−6−500×10−6 of CH4. The sensor also exhibited a low detection limit (20×10−6), good humidity resistance, excellent repeatability (relative standard deviation<5%), and long-term stability. The research provides a new design concept for developing high-performance room-temperature methane sensors. |
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| 备注/Memo: | 收稿日期：2025−03−25 宁波大学学报（理工版）网址：http://journallg.nbu.edu.cn/ 基金项目：国家自然科学基金（62471425，62071410） 第一作者：张 勇，教授，主要研究方向为气体、湿度传感器。E-mail: zhangyong@xtu.edu.cn 宁波大学学报（理工版）网址：http://journallg.nbu.edu.cn/ |
